research article
Structural and Electrical Properties of Undoped Microcrystalline Silicon Grown by 70 MHz and 13.56 MHz PECVD
1994
Type
research article
Author(s)
Flückiger, R.
Meier, J.
Crovini, G.
Demichelis, F.
Giorgis, F.
Pirri, C.F.
Tresso, E.
Pohl, J.
Rigato, V.
Zandolin, S.
Date Issued
1994
Published in
Volume
358
Start page
751
End page
756
Note
IMT-NE Number: 187
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
February 10, 2009
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