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research article

Very High Q-Factor Resonators in Monocrystalline Silicon

Buser, R.
•
de Rooij, N. F.  
1990
Sensors and Actuators A: Physical
  • Details
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Type
research article
DOI
10.1016/0924-4247(90)85064-B
Author(s)
Buser, R.
•
de Rooij, N. F.  
Date Issued

1990

Published in
Sensors and Actuators A: Physical
Volume

21-23

Start page

323

End page

327

Note

42

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39123
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