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  4. Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors
 
research article

Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

Fan, Xuge
•
Moreno-Garcia, Daniel
•
Ding, Jie
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December 1, 2023
Acs Applied Nano Materials

The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene's fundamental material characteristics and thus enable innovative device concepts for applications such as sensors. Here, we demonstrate resonant transducers with ribbon-springs made of double-layer graphene and proof masses made of silicon and study their nonlinear mechanics at resonance both in air and in vacuum by laser Doppler vibrometry. Surprisingly, we observe spring-stiffening and spring-softening at resonance, depending on the graphene spring designs. The measured quality factors of the resonators in a vacuum are between 150 and 350. These results pave the way for a class of ultraminiaturized nanomechanical sensors such as accelerometers by contributing to the understanding of the dynamics of transducers based on graphene ribbons with an attached proof mass.

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Type
research article
DOI
10.1021/acsanm.3c03642
Web of Science ID

WOS:001143432000001

Author(s)
Fan, Xuge
•
Moreno-Garcia, Daniel
•
Ding, Jie
•
Gylfason, Kristinn B.
•
Guillermo Villanueva, Luis Guillermo  
•
Niklaus, Frank
Date Issued

2023-12-01

Publisher

Amer Chemical Soc

Published in
Acs Applied Nano Materials
Volume

7

Issue

1

Start page

102

End page

109

Subjects

Technology

•

Graphene

•

Resonators

•

Suspendedgraphene

•

Nonlinear Resonance

•

Nems

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
FunderGrant Number

National Outstanding Youth Science Fund Project of National Natural Science Foundation of China

62171037

National Natural Science Foundation of China

4232076

Beijing Natural Science Foundation

2DNEMS

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Available on Infoscience
February 21, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/205075
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