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research article
Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators
Type
research article
Web of Science ID
WOS:000238920900015
Authors
Publication date
2006
Volume
53
Issue
7
Start page
1339
End page
1343
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
October 18, 2007
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