research article

Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators

Martin, F.  
•
Jan, M. E.  
•
Rev-Mermet, S.
Show more
2006
Ieee Transactions On Ultrasonics Ferroelectrics And Frequency Control
Type
research article
DOI
10.1109/TUFFC.2006.1665082
Web of Science ID

WOS:000238920900015

Author(s)
Martin, F.  
Jan, M. E.  
Rev-Mermet, S.
Belgacem, B.  
Su, D.  
Cantoni, M.  
Muralt, P.  
Date Issued

2006

Published in
Ieee Transactions On Ultrasonics Ferroelectrics And Frequency Control
Volume

53

Issue

7

Start page

1339

End page

1343

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
October 18, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/13092