book part or chapter
Electrostatically Actuated Silicon Micromachined Sensors for Scanning Force Microscopy
1995
Forces in Scanning Probe Methods
Type
book part or chapter
Author(s)
Date Issued
1995
Publisher
Publisher place
Dordrecht
Published in
Forces in Scanning Probe Methods
ISBN of the book
94-011-0049-7
Start page
79
End page
84
Series title/Series vol.
NATO ASI Series; 286
Note
128
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record