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book part or chapter
Chapter 13 “MEMS Devices” in Fundamentals of Industrial Electronics (The Industrial Electronics Handbook)
Type
book part or chapter
Authors
Quero, J. M.
•
Luque, Antonio
•
Castañer, L.
•
Rodríguez, A.
•
•
Faraone, L.
•
Dell, .J. M
Publication date
2011
Publisher
Published in
The Industrial Electronics Handbook
ISBN of the book
978-1-4398-0280-9
EPFL units
Available on Infoscience
February 13, 2012
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