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  4. Frequency stability of PZE actuated suspended micro-channel resonators
 
conference presentation

Frequency stability of PZE actuated suspended micro-channel resonators

De Pastina, Annalisa  
September 14, 2017
NanoFluidics and NanoMechanics Workshop

We show the fabrication and characterization of a new generation of suspended microchannel resonators (SMRs) with integrated piezoelectric (PZE) actuation. We study resonance frequency, quality factor and frequency stability of singly-clamped hollow devices. Measurements of empty devices in air and vacuum show no significant difference in the frequency stability whereas the quality factor differs by a factor of 19x. The same analysis are performed when the SMRs are filled with DI water. In this case the quality factor between air and vacuum environment differs 11x, while the frequency stability is almost identical for integration times below 300 ms. This independence of the frequency stability on the quality factor suggests that vacuum encapsulation is not strictly necessary in order to achieve state of the art sensing performances when analyzing fluidic samples, ultimately simplifying the experimental setup.

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Type
conference presentation
Author(s)
De Pastina, Annalisa  
Date Issued

2017-09-14

Total of pages

10

Subjects

Suspended Microchannel Resonators

•

Frequency Stability

•

Allan Deviation

•

Quality Factor

Written at

EPFL

EPFL units
NEMS  
Event nameEvent placeEvent date
NanoFluidics and NanoMechanics Workshop

Turin

September 14-15, 2017

Available on Infoscience
February 6, 2018
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/144672
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