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conference paper
Characteristics of Buckled Bridges and Lifted Micromirror Using Film Stress
2006
IEEE/LEOS Optical MEMS 2006
Type
conference paper
Authors
Publication date
2006
Published in
IEEE/LEOS Optical MEMS 2006
Start page
82
End page
83
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record