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research article
Oxidation of Silicon - New Electron-Spectroscopy Results
Type
research article
Authors
Publication date
1976
Published in
Volume
20
Issue
3
Start page
277
End page
280
Note
Bell tel labs inc,murray hill,nj 07974. inst grenzflach forsch & vacuum phys,kern forsch lage,julich,fed rep ger.
ISI Document Delivery No.: CE334
Peer reviewed
REVIEWED
Available on Infoscience
October 3, 2006
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