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conference presentation

Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope

Kim, Myun Sik 
•
Scharf, Toralf 
•
Herzig, Hans Peter 
2010
8th Fraunhofer IISB Lithography Simulation Workshop
Type
conference presentation
Authors
Kim, Myun Sik 
•
Scharf, Toralf 
•
Herzig, Hans Peter 
Publication date

2010

EPFL units
OPT 
Event nameEvent placeEvent date
8th Fraunhofer IISB Lithography Simulation Workshop

Hersbruck, Germany

September 23-25, 2010

Available on Infoscience
December 13, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/62085