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  4. Correction of surface error occurring in microlenses characterization performed by optical profilers
 
conference paper

Correction of surface error occurring in microlenses characterization performed by optical profilers

Beguelin, Jeremy
•
Scharf, Torald  
•
Noell, Wilfried
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January 1, 2019
Optical Measurement Systems For Industrial Inspection Xi
Conference on Optical Measurement Systems for Industrial Inspection XI held at SPIE Optical Metrology Symposium

Characterizing the surface of microlenses by optical profilers has the important advantages of measurement speed, flexibility and automation. Nevertheless, the accuracy of such characterization is limited by error occurring in non-flat measurements. Here, we propose a method that uses multiple measurements of a single reference ball combined with a machine learning algorithm that fits the experimental data to correct the measurements. The success of the method is demonstrated by showing that the residual error after correction reaches 20nm RMS. Such results extend greatly the quality of microlens characterization by optical profilers.

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Type
conference paper
DOI
10.1117/12.2525693
Web of Science ID

WOS:000502140100029

Author(s)
Beguelin, Jeremy
Scharf, Torald  
Noell, Wilfried
Voelkel, Reinhard
Date Issued

2019-01-01

Publisher

SPIE-INT SOC OPTICAL ENGINEERING

Publisher place

Bellingham

Published in
Optical Measurement Systems For Industrial Inspection Xi
ISBN of the book

978-1-5106-2792-5

Series title/Series vol.

Proceedings of SPIE

Volume

11056

Start page

110560Z

Subjects

Engineering, Industrial

•

Engineering, Manufacturing

•

Optics

•

Engineering

•

microlens characterization

•

confocal microscopy

•

coherence scanning interferometry

•

spherical surface

•

aberrations

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NAM  
Event nameEvent placeEvent date
Conference on Optical Measurement Systems for Industrial Inspection XI held at SPIE Optical Metrology Symposium

Munich, GERMANY

Jun 24-27, 2019

Available on Infoscience
December 29, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/164227
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