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Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering
research article
A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.
Type
research article
Web of Science ID
WOS:000286934900004
Author(s)
Date Issued
2011
Published in
Volume
20
Start page
15
End page
17
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
December 16, 2011
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