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2006
XX Eurosensors
MEMS Capacitive Pressure Sensor Based on Polysilicon Sealed Membrane
conference paper
This paper presents a pressure sensor based on a variable capacitor formed by a movable polysilicon sealed membrane sensitive to pressure. When operated as a pressure sensor two operation regions are observed, an exponentially sensitivity region at low pressure (0-100mmHg) and a linear sensitivity region (20-400kPa) in the touch operation mode. Preliminary results show a sensitivity of 2.2fF/mmHg and are in good agreement with analytical and finite-element simulations.
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Name
Eurosensor_2006_MFBolanos.pdf
Type
Postprint
Access type
restricted
Size
183.63 KB
Format
Adobe PDF
Checksum (MD5)
f4ebd9c9f882e2e6fd2330dee241a05b