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  4. Electric-field poling of a silicon nitride microring resonator for linear electro-optic modulation
 
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conference paper

Electric-field poling of a silicon nitride microring resonator for linear electro-optic modulation

Zabelich, Boris  
•
Nitiss, Edgars  
•
Lafforgue, Christian  
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Garcia-Blanco, Sonia M.
•
Cheben, Pavel
2024
Proceedings of SPIE - The International Society for Optical Engineering
28 Integrated Optics: Devices, Materials, and Technologies

The centrosymmetric structure of stoichiometric silicon nitride inhibits the realization of second-order nonlinear processes in this low-loss, complementary-metal-oxide-semiconductor fabrication-compatible platform. Nevertheless, linear electro-optic modulation is an essential functionality desired for implementation in photonic integrated circuits. This study presents the successful achievement of electro-optical modulation in a silicon nitride microring resonator, employing thermally assisted electric-field poling. With an inscribed electric field of 100 V/μm within the silicon nitride waveguide, an effective second-order susceptibility of 0.45 pm/V is induced. Leveraging silicon nitride as the active material for electro-optic modulation, we determined the operational bandwidth of the device, constrained by the electrode design, to be 78 MHz. Furthermore, we demonstrate the capability of the device to modulate data at bitrates of up to 75 Mb/s. Our findings highlight the potential of linear electro-optical modulation in the silicon nitride integrated platform.

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Type
conference paper
DOI
10.1117/12.3001820
Scopus ID

2-s2.0-85191422819

Author(s)
Zabelich, Boris  
•
Nitiss, Edgars  
•
Lafforgue, Christian  
•
Stroganov, Anton
•
Brès, Camille Sophie  
Editors
Garcia-Blanco, Sonia M.
•
Cheben, Pavel
Date Issued

2024

Publisher

SPIE

Published in
Proceedings of SPIE - The International Society for Optical Engineering
ISBN of the book

9781510670389

Book part number

12889

Article Number

1288907

Subjects

electric-field poling

•

electro-optical modulation

•

Nonlinear optics

•

second-order nonlinear effects

•

silicon nitride

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LIGENTEC
PHOSL  
Event nameEvent acronymEvent placeEvent date
28 Integrated Optics: Devices, Materials, and Technologies

San Francisco, United States

2024-01-29 - 2024-02-01

FunderFunding(s)Grant NumberGrant URL

EPFL

ERC

ERC-2017-CoG 771647

Available on Infoscience
January 26, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/244962
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