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research article

Fabrication of arrays of sub-wavelength nano-apertures in an optically thick gold layer on glass slides for optical studies

Perentes, A.  
•
Utke, I.  
•
Dwir, B.  
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2005
Nanotechnology

We report on the fabrication of two-dimensional arrays of nano-optical apertures in gold layers by electron beam lithography (EBL) on a transparent glass substrate. 30 x 30 μ m(2) large arrays of high aspect ratio sub-wavelength cylinders (400 nm diameter with period of 1.81 μ m) and annular apertures (diameters 250/330 nm and 3 10/330 nm inner/outer with period of 600 nm) were patterned in a 750 nm thick resist layer using a high contrast negative tone resist. The resist structures show sharp and vertical edges after development. The 150 nm thick deposited gold layer ensures optical transmission of less than 1.1 X 10(-4) at 633 nm wavelength. White light based optical characterizations agreed with theory predictions and prove the good quality of the structures.

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Type
research article
DOI
10.1088/0957-4484/16/5/025
Web of Science ID

WOS:000229558100026

Author(s)
Perentes, A.  
•
Utke, I.  
•
Dwir, B.  
•
Leutenegger, M.  
•
Lasser, T.  
•
Hoffmann, P.  
•
Baida, F.
•
Bernal, M. P.
•
Russey, M.
•
Salvi, J.
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Date Issued

2005

Published in
Nanotechnology
Volume

16

Issue

5

Start page

S273

End page

S277

Subjects

Light transmission

URL

URL

http://www.iop.org/EJ/S/3/303/yhVw5bi,fYpMZ,6HkC8eAw/article/0957-4484/16/5/025/nano5_5_025.pdf
Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
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Available on Infoscience
October 3, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/234936
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