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research article

Engineered acoustic mismatch for anchor loss control in contour mode resonators

Lozzi, Andrea  
•
De Pastina, Annalisa  
•
Yen, Ernest Ting-Ta
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March 11, 2019
Applied Physics Letters

Improving the quality factor (Q) of electromechanical resonators is of paramount importance for different applications, ranging from RF filtering to sensing. In this paper, we present a modified fabrication process flow for contour mode resonators to simultaneously obtain the (i) Q insensitive to the Si undercut geometry and (ii) in-phase reflectors for anchor loss control and Q optimization. To assess the potential of the reflector, we vary its distance from the resonator's anchor. This results in a periodic trend of Q when the distance between the anchor and the reflector changes. Further confirmation of the trend is obtained via a finite element (FE) model. Interestingly, when in the FE model, the step between consecutive reflectors is decreased by a factor of 6x with respect to the experimental step, we observe a fast modulation of Q, superimposed onto that seen experimentally. The origin of this fast modulation is likely the coexistence of waves with different wavelengths traveling through the released region. Our results show that the profile of the region undergoing Si undercutting (released area) can be easily set by design. Furthermore, engineering the introduced acoustic mismatch provides unprecedented control of anchor loss. Published under license by AIP Publishing.

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Type
research article
DOI
10.1063/1.5086156
Web of Science ID

WOS:000461512000041

Author(s)
Lozzi, Andrea  
De Pastina, Annalisa  
Yen, Ernest Ting-Ta
Villanueva, Luis Guillermo  
Date Issued

2019-03-11

Published in
Applied Physics Letters
Volume

114

Issue

10

Article Number

103502

Subjects

Physics, Applied

•

Physics

•

quality factor

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Available on Infoscience
June 18, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/157065
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