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conference paper

Characterization of crystallographically etched single crystal diamond diffraction gratings

Kiss, Marcell  
•
Gipziosi, Teodoro
•
Toros, Adrien  
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January 1, 2018
2018 International Conference On Optical Mems And Nanophotonics (Omn)
International Conference on Optical MEMS and Nanophotonics (OMN)

We report on the fabrication and experimental characterization of single crystal diamond diffraction gratings fabricated with crystallographic dry etching. High aspect ratio atomic force microscopy reveals a characteristic V-groove profile exhibiting smooth sidewalls with an angle of 57 degrees. The discrepancy compared to the (111) crystal plane angle of 54.7 degrees can be explained by a directional isotropic etch contribution, which we confirm by etch process modelling based on the continuous automata method. The optical flatness of the diffraction gratings is measured using interferometry and better than lambda/2.

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Type
conference paper
DOI
10.1109/OMN.2018.8454634
Web of Science ID

WOS:000454732000084

Author(s)
Kiss, Marcell  
•
Gipziosi, Teodoro
•
Toros, Adrien  
•
Scharf, Toralf  
•
Martin, Olivier J. F.  
•
Quack, Niels  
Date Issued

2018-01-01

Publisher

IEEE

Publisher place

New York

Published in
2018 International Conference On Optical Mems And Nanophotonics (Omn)
ISBN of the book

978-1-5090-6374-1

Series title/Series vol.

International Conference on Optical MEMS and Nanophotonics

Start page

173

End page

174

Subjects

Engineering, Electrical & Electronic

•

Nanoscience & Nanotechnology

•

Optics

•

Engineering

•

Science & Technology - Other Topics

•

single crystal diamond

•

crystallographic etching

•

diffraction grating

•

etch modelling

•

optical flatness

•

interferometry

•

fabrication

•

simulation

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NAM  
GR-QUA  
Event nameEvent placeEvent date
International Conference on Optical MEMS and Nanophotonics (OMN)

Lausanne, SWITZERLAND

Jul 29-Aug 02, 2018

Available on Infoscience
January 23, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/153752
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