Modeling and simulation of electromechanical transducers in microsystems using an analog hardware description language.
The analytical modeling and simulation of conservative electrostatic, electromagnetic and electrodynamic transducers found in microsystems using a non-linear lumped-parameter approach is presented in this paper. A comparison is made between this approach and the linearized equivalent circuit method All models of transducers are written in HDL-A(TM), a proprietary analogue hardware description language (HDL). System-level simulation is performed in the SPICE simulator using behavioral models of the transducers. Finally, a parameter extraction and HDL model generation tool for devices is presented.
WOS:A1997BH54U00018
1997
1
119
123
REVIEWED
EPFL
Event name | Event place | Event date |
PARIS, FRANCE | MAR 17-20, 1997 | |