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Modular interface and experimental setup for in-vacuum operation of microfluidic devices

Maillard, Damien  
•
De Pastina, Annalisa  
•
Larsen, Tom  
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April 1, 2019
Review of Scientific Instruments

We report on the design and operation of a world-to-chip microfluidic interface and experimental setup for fluidic micro- and nano-electromechanical systems. The central component of the interface is an engineered polyether ether ketone connector that brings fluid samples from a commercial syringe pump to the chip with the help of o-rings. In addition to that, the connector serves as an on-chip vacuum chamber. To confirm the adequate operation of our interface, we use complex microfluidic devices that were previously fabricated, suspended microchannel resonators, and demonstrate a fast exchange between fluids (on the scale of 130 s from isopropyl alcohol to water), in-vacuum operation of the devices (intrinsic damping regime), and accurate temperature control of the chip at different set points.

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maillard_modular_interfaces_merged.pdf

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Publisher's Version

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openaccess

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Copyright

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1.8 MB

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Adobe PDF

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3d2d5d0526e228a5e8c3bd5b2e002bf3

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