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  4. Fabrication of polymeric micro structures by controlled drop on demand inkjet printing
 
conference paper

Fabrication of polymeric micro structures by controlled drop on demand inkjet printing

Jacot-Descombes, Loïc  
•
Gullo, Rosario Maurizio  
•
Cadarso Busto, Victor Javier  
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2011
Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
22nd Micromechanics and Micro systems Europe Workshop

Well controlled spherical microstructures could enable several novel MEMS devices. However, micro machining of spherical shapes has proven to be difficult with conventional planar microfabrication processes [1]. This paper presents a method allowing to fabricate controlled micro spherical structures. Drops of approximately 30 picoliters of polymeric solution were accurately inkjet printed on rounded platforms. The deposited volume is confined by rim of these platforms, thus allowing a fine control of the spherical cap edge angle as well as the volume and the radius of curvature. The process proposed allowed to fabricate large arrays of micro spherical shapes, with a controlled edge angle between 25° and 110°. Several arrays of 30 by 30 micro hemispheres with an edge angle of 90° have been successfully fabricated with a yield above 98%.

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Type
conference paper
Author(s)
Jacot-Descombes, Loïc  
Gullo, Rosario Maurizio  
Cadarso Busto, Victor Javier  
Brugger, Jürgen  
Date Issued

2011

Publisher

Department of micro and nano systems technology Vestfold University College, Norway

Publisher place

Norway

Published in
Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
ISBN of the book

978-82-7860-224-9

Issue

A20

Start page

97

End page

100

Subjects

SU-8-based epoxy ink

•

drop-on-demand inkjet printing

•

micro drop confinement

•

micro spherical cap arrays

•

micro lens arrays

•

radius of curvature controlled

Note

Obtained the best poster award

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LMIS1  
Event nameEvent placeEvent date
22nd Micromechanics and Micro systems Europe Workshop

Toensberg, Norway

June 19-22, 2011

Available on Infoscience
August 28, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/70303
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