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conference presentation
Optimization of Piezoresistive Cantilever Sensors towards Highly Sensitive Membrane-type Surface Stress Sensor (MSS)
2011
Type
conference presentation
Authors
Publication date
2011
EPFL units
Event name | Event place | Event date |
Dublin, Ireland | May 11-13, 2011 | |
Available on Infoscience
November 28, 2011
Use this identifier to reference this record