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  4. Optimization of Piezoresistive Cantilever Sensors towards Highly Sensitive Membrane-type Surface Stress Sensor (MSS)
 
conference presentation

Optimization of Piezoresistive Cantilever Sensors towards Highly Sensitive Membrane-type Surface Stress Sensor (MSS)

Yoshikawa, G.
•
Akiyama, Terunobu  
•
Gautsch, Sebastian  
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2011
8th International Workshop on Nanomechanical Sensing 2011
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Type
conference presentation
Author(s)
Yoshikawa, G.
Akiyama, Terunobu  
Gautsch, Sebastian  
Vettiger, Peter
Rohrer, H.
Date Issued

2011

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
8th International Workshop on Nanomechanical Sensing 2011

Dublin, Ireland

May 11-13, 2011

Available on Infoscience
November 28, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/72863
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