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  4. Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films
 
conference paper

Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films

Kurz, Nicolas
•
Parsapour, Fazel  
•
Pashchenko, Vladimir  
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January 1, 2018
2018 Ieee International Ultrasonics Symposium (Ius)
IEEE International Ultrasonics Symposium (IUS)

In this work, bar- and disk-shaped resonators were fabricated using Al(0.8)4Sc(0.16)N thin film Sensitivity analysis of the resonators' resonance frequencies with respect to the piezoelectric material parameters revealed that resonance analysis can be used for material parameter extraction. An optimization algorithm is employed to determine the piezoelectric material parameters S-11(E), s(12)(E), and d(31) of Al0.84Sc0.16N from the length- and radial-extensional mode. Using the piezoelectric constitutive equations and combining the results obtained in this work with the results obtained in a previous work, the stress-charge form of elastic and piezoelectric parameters could be derived.

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Type
conference paper
DOI
10.1109/ULTSYM.2018.8579706
Web of Science ID

WOS:000458693000060

Author(s)
Kurz, Nicolas
Parsapour, Fazel  
Pashchenko, Vladimir  
Kirste, Lutz
Lebedev, Vadim
Pascal, Nicolay
Muralt, Paul  
Ambacher, Oliver
Date Issued

2018-01-01

Publisher

IEEE

Publisher place

New York

Published in
2018 Ieee International Ultrasonics Symposium (Ius)
ISBN of the book

978-1-5386-3425-7

Series title/Series vol.

IEEE International Ultrasonics Symposium

Subjects

Engineering, Electrical & Electronic

•

Engineering

•

piezoelectric material parameters

•

bar resonator

•

disk resonator

•

alscn thin film

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Event nameEvent placeEvent date
IEEE International Ultrasonics Symposium (IUS)

Kobe, JAPAN

Oct 22-25, 2018

Available on Infoscience
June 18, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/157574
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