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  4. Silicon microcantilevers with piezoresistive and MOSFET detection
 
conference paper

Silicon microcantilevers with piezoresistive and MOSFET detection

Tosolini, G.
•
Villanueva, G.  
•
Bausells, J.
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2009
7th Spanish Conference on Electron Devices (CDE)
7th Spanish Conference on Electron Devices (CDE)
  • Details
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Type
conference paper
DOI
10.1109/SCED.2009.4800525
Author(s)
Tosolini, G.
•
Villanueva, G.  
•
Bausells, J.
•
García Loureiro, A.
•
Iglesias, N. S.
•
Aldegunde Rodríguez, M. A.
•
Comesana Figueroa, E.
Date Issued

2009

Published in
7th Spanish Conference on Electron Devices (CDE)
Volume

Poster

Start page

428

End page

31

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
NEMS  
Event nameEvent placeEvent date
7th Spanish Conference on Electron Devices (CDE)

Santiago de Compostela, Spain

2009

Available on Infoscience
August 6, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/93844
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