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  4. Off-axis electron holography for the direct visualization of perpendicular shape anisotropy in nanoscale 3D magnetic random-access-memory devices
 
research article

Off-axis electron holography for the direct visualization of perpendicular shape anisotropy in nanoscale 3D magnetic random-access-memory devices

Almeida, Trevor P.
•
Palomino, Alvaro
•
Lequeux, Steven
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June 1, 2022
Apl Materials

Perpendicular shape anisotropy (PSA) and double magnetic tunnel junctions (DMTJs) offer practical solutions to downscale spin-transfer-torque Magnetic Random-Access Memory (STT-MRAM) beyond 20 nm technology nodes, while retaining their thermal stability and reducing critical currents applied. However, as these modern devices become smaller and three-dimensionally (3D) complex, our understanding of their functional magnetic behavior is often indirect, relying on magnetoresistance measurements and micromagnetic modeling. In this paper, we review recent work that was performed on these structures using a range of advanced electron microscopy techniques, focusing on aspects specific to the 3D and nanoscale nature of such elements. We present the methodology for the systematic transfer of individual SST-MRAM nano-pillars from large-scale arrays to image their magnetic configurations directly using off-axis electron holography. We show that improved phase sensitivity through stacking of electron holograms can be used to image subtle variations in DMTJs and the thermal stability of in situ heating. The experimental practicalities, benefits, and limits of using electron holography for the analysis of MRAM devices are discussed, unlocking practical pathways for direct imaging of the functional magnetic performance of these systems with high spatial resolution and sensitivity. (C) 2022 Author(s).

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Type
research article
DOI
10.1063/5.0096761
Web of Science ID

WOS:000808549500001

Author(s)
Almeida, Trevor P.
Palomino, Alvaro
Lequeux, Steven
Boureau, Victor  
Fruchart, Olivier
Prejbeanu, Ioan Lucian
Dieny, Bernard
Cooper, David
Date Issued

2022-06-01

Publisher

AIP Publishing

Published in
Apl Materials
Volume

10

Issue

6

Article Number

061104

Subjects

Nanoscience & Nanotechnology

•

Materials Science, Multidisciplinary

•

Physics, Applied

•

Science & Technology - Other Topics

•

Materials Science

•

Physics

•

tunnel-junctions

•

spintronics

•

stability

•

summation

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CIME  
Available on Infoscience
July 4, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/189000
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