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  4. Acoustic Actuation Of Suspended Graphene For Linear Excitation Of 2D Nems
 
conference paper

Acoustic Actuation Of Suspended Graphene For Linear Excitation Of 2D Nems

Faizan, Muhammad  
•
Parmar, Marsha M.
•
Feng, Philip X-L
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January 1, 2019
2019 20Th International Conference On Solid-State Sensors, Actuators And Microsystems & Eurosensors Xxxiii (Transducers & Eurosensors Xxxiii)
20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS)

In this paper, we present the fabrication of on-chip piezoelectric acoustic actuation for 2D materials. Acoustic actuation is achieved at device level through patterning of aluminum nitride (AlN) thin film at wafer scale. Two piezoelectric stacks consisting of a 100 nm-thick AlN layer sandwiched between 25 nm-thick platinum (Pt) and molybdenum (Mo) electrodes are fabricated close to the suspended 2D material such as graphene. The graphene nanoelectromechanical resonator is first actuated electrostatically using highly doped silicon (Si) back gate. Due to the effect of damping on amplitude, the frequency response curves do not lie on top of each other. Nonetheless, when actuated through the on-chip piezoelectric stack, the various frequency response curves lie on top of each other, indicating a linearly damped system. We also find that the acoustic actuation technique to be less dissipative than the electrostatic one.

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Type
conference paper
DOI
10.1109/TRANSDUCERS.2019.8808246
Web of Science ID

WOS:000539487000603

Author(s)
Faizan, Muhammad  
•
Parmar, Marsha M.
•
Feng, Philip X-L
•
Villanueva, Luis Guillermo  
Date Issued

2019-01-01

Publisher

IEEE

Publisher place

New York

Published in
2019 20Th International Conference On Solid-State Sensors, Actuators And Microsystems & Eurosensors Xxxiii (Transducers & Eurosensors Xxxiii)
ISBN of the book

978-1-7281-2007-2

Start page

2380

End page

2383

Subjects

nanoelectromechanical systems (nems)

•

graphene

•

2d materials

•

acoustic actuation

•

nonlinear damping

•

electrostatic actuation

•

linear damping

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Event nameEvent placeEvent date
20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS)

Berlin, GERMANY

Jun 23-27, 2019

Available on Infoscience
July 9, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/169921
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