conference paper
Technology and Applications of Micro Electro Mechanical Systems
2004
Hilti Workshop on Microsystems Technology
Type
conference paper
Author(s)
Date Issued
2004
Published in
Hilti Workshop on Microsystems Technology
Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record