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  4. Technology and Applications of Micro Electro Mechanical Systems
 
conference paper

Technology and Applications of Micro Electro Mechanical Systems

de Rooij, N. F.  
2004
Hilti Workshop on Microsystems Technology
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Type
conference paper
Author(s)
de Rooij, N. F.  
Date Issued

2004

Published in
Hilti Workshop on Microsystems Technology
Peer reviewed

NON-REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39757
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