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conference paper
Novel High Speed 3 DOF Linear Drive Operating with Submicron Precision
1998
Microrobotics and Microsystem Fabrication
Type
conference paper
Authors
Publication date
1998
Published in
Microrobotics and Microsystem Fabrication
Series title/Series vol.
SPIE Proceedings; 3202
URL
Conference Web Site
Peer reviewed
REVIEWED
EPFL units
| Event name | Event place | Event date |
Pittsburgh, USA | October 13-17, 1997 | |
Available on Infoscience
December 7, 2006
Use this identifier to reference this record