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conference paper
Investigation of oxidation-induced strain in a top-down Si nanowire platform
2009
the 16th biennial conference on Insulating Films on Semiconductors
Type
conference paper
Authors
Publication date
2009
Published in
the 16th biennial conference on Insulating Films on Semiconductors
Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Cambridge, the UK | 28 June-1 July 2009 | |
Available on Infoscience
March 1, 2012
Use this identifier to reference this record