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conference paper
From Micro-Optics to optical MEMS
2003
Ninth Microoptics Conference MOC'03
Type
conference paper
Authors
Publication date
2003
Publisher
Published in
Ninth Microoptics Conference MOC'03
Series title/Series vol.
Technical Digest
Start page
88
End page
91
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record