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research article

T-shaped microcantilever sensor with reduced deflection offset

Plaza, J. A.
•
Zinoviev, K.
•
Villanueva, G.  
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2006
Applied Physics Letters

The authors have designed and fabricated arrays of microcantilevers with a geometry that shows reduced initial angular offset and angle deviation between the cantilevers of the array. This feature allows to detect the displacement of the cantilevers using the optical beam deflection technique and a single split photodetector. The structure is analytically and numerically simulated to demonstrate its feasibility. In addition, experimental measurements of the angle offset corroborate the offset and the angle deviation reduction. Finally, they illustrate the potential of these micromechanical structures as sensors by measuring a monolayer of single stranded DNA. (c) 2006 American Institute of Physics.

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Type
research article
DOI
10.1063/1.2345234
Web of Science ID

WOS:000240236600136

Author(s)
Plaza, J. A.
•
Zinoviev, K.
•
Villanueva, G.  
•
Alvarez, M.
•
Tamayo, J.
•
Dominguez, C.
•
Lechuga, L. M.
Date Issued

2006

Published in
Applied Physics Letters
Volume

89

Issue

9

Article Number

094109

Subjects

cantilever array

•

fabrication

Note

Plaza, JA CSIC, Ctr Nacl Microelect, Campus UAB, Barcelona 08193, Spain CSIC, Ctr Nacl Microelect, Barcelona 08193, Spain

080GT

Cited References Count:16

Peer reviewed

REVIEWED

Written at

OTHER

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Available on Infoscience
August 6, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/93838
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