conference paper
A Study of Fabrication Techniques for Sub-10nm Thin Undulated Polysilicon Films
2003
2003 International Semiconductor Conference. CAS 2003 Proceedings
Type
conference paper
Author(s)
Date Issued
2003
Published in
2003 International Semiconductor Conference. CAS 2003 Proceedings
Volume
1
Start page
95
End page
98
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
October 10, 2007
Use this identifier to reference this record