conference paper
Microfabrication Technologies for Microsystems
1997
Micromachining and Microfabrication Process Technology III
Type
conference paper
Author(s)
Date Issued
1997
Published in
Micromachining and Microfabrication Process Technology III
Series title/Series vol.
SPIE Proceedings; 3223
Start page
40058
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record