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conference paper
Optimization of the channel lateral strain profile for improved performance of multi-gate MOSFETs
2009
International Symposium on VLSI Technology, Systems, and Applications, Proceedings
We report for the first time the optimization of the channel lateral strain profile as a new technological booster for improved performance of multi-gate n-channel MOSFET. We find that quasi-uniform or flat-Gaussian-close-to-the-drain profiles are optimum for the Ion boosting of sub-50nm scaled MOSFETs, while the penalty on Ioff and subthreshold slope is minimum. The reported predictions use realistic lateral uniaxial strain profiles, with peaks up to few GPa's and average values of hundreds of MPa's. ©2009 IEEE.
Type
conference paper
Web of Science ID
WOS:000272451000053
Authors
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Dobrosz, P.
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Olsen, S.
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O'Neill, A.
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Selmi, L.
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Publication date
2009
Published in
International Symposium on VLSI Technology, Systems, and Applications, Proceedings
Start page
119
End page
120
Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
Event name | Event place | Event date |
Hsinchu, TAIWAN | Apr 27-29, 2009 | |
Available on Infoscience
November 8, 2010
Use this identifier to reference this record