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  4. Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators
 
research article

Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators

Yandrapalli, Soumya  
•
Eroglu, Seniz Esra Kucuk
•
Plessky, Victor
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January 24, 2022
Journal Of Microelectromechanical Systems

This work presents an in-depth study of simulation and measurement results of laterally excited shear bulk acoustic resonators (XBAR) in Lithium Niobate, at 5 GHz with high electromechanical coupling factor (k(t)(2)) as high as 25%, and with impedances at resonance close to 2 Omega. Loaded Quality factors of up to 340 and 150 are obtained at resonance and anti-resonance, respectively. Experimental00 dispersion behaviors of main mode and spurious are presented. Several geometric parameters affecting resonator performance are studied in order to improve figure of merits (FoM) of the device for 5G filter applications. The modified fabrication process presented shows a high yield of over 90% of devices which can be scalable for mass production of high frequency, sub-6 GHz, wide band filters.

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Type
research article
DOI
10.1109/JMEMS.2022.3143354
Web of Science ID

WOS:000750266900001

Author(s)
Yandrapalli, Soumya  
•
Eroglu, Seniz Esra Kucuk
•
Plessky, Victor
•
Atakan, H. Baris
•
Villanueva, Luis Guillermo  
Date Issued

2022-01-24

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

Published in
Journal Of Microelectromechanical Systems
Subjects

Engineering, Electrical & Electronic

•

Nanoscience & Nanotechnology

•

Instruments & Instrumentation

•

Physics, Applied

•

Engineering

•

Science & Technology - Other Topics

•

Physics

•

lithium niobate

•

thin films

•

bulk acoustic resonator (baw)

•

a1 mode

•

shear wave

•

lamb wave

•

5 ghz

•

5g application

•

large bandwidth

•

electromechanical coupling

•

k(t)(2)

•

acoustic filters

•

microfabrication

•

rf mems

•

cut lithium-niobate

•

frequency

•

technology

Editorial or Peer reviewed

REVIEWED

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February 28, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/185797
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