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dataset

PECVD System B

Thomet, Jonathan  
September 14, 2023
EPFL Infoscience

Raw experimental data sorted by tool

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Type
dataset
DOI
10.5075/epfl-PV-LAB-309573
ACOUA ID

ea730916-e32f-4b3b-a79d-1ac0b076fd72

Author(s)
Thomet, Jonathan  
Date Issued

2023-09-14

Version

1

Publisher

EPFL Infoscience

Subjects

InGaN PECVD

•

PV applications

Note

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RelationURL/DOI

IsSupplementedBy

https://infoscience.epfl.ch/record/298144
Available on Infoscience
March 14, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/206118
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