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patent
Waveguide Fabrication Method
2016
A waveguide fabrication method including the steps of providing a substrate including at least one waveguide recess structure and a stress release recess structure for receiving a waveguide material, and depositing the waveguide material onto the substrate and into both the waveguide recess structure and the stress release recess structure.
Type
patent
EPO Family ID
57221860
Inventors
Note
Alternative title(s) : (en) Waveguide fabrication method
TTO classification
TTO:6.1485
Patent number | Country code | Kind code | Date issued |
US10191215 | US | B2 | 2019-01-29 |
US2016327743 | US | A1 | 2016-11-10 |
Available on Infoscience
May 11, 2017
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