Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Patents
  4. Active multi gate micro-electro-mechanical device with built-in transistor
 
patent

Active multi gate micro-electro-mechanical device with built-in transistor

Ionescu, Mihai Adrian  
•
Grogg, Daniel
2010

The present invention exploits the combination of the amplification, provided by the integration of a FET (or any other three terminal active device), with the signal modulation, provided by the MEM resonator, to build a MEM resonator with built-in transistor (hereafter called active MEM resonator). In these devices, a mechanical displacement is converted into a current modulation and depending on the active MEM resonator geometry, number of gates and bias conditions it is possible to selectively amplify an applied signal. This invention integrates proposes to integrate transistor and micro-electro-mechanical resonator operation in a device with a single body and multiple surrounding gates for improved performance, control and functionality. Moreover, under certain conditions, an active resonator can serve as DC-AC converter and provide at the output an AC signal corresponding to its mechanical resonance frequency.

  • Details
  • Metrics
Type
patent
EPO Family ID

41839707

Author(s)
Ionescu, Mihai Adrian  
Grogg, Daniel
Note

Alternative title(s) : (en) Active multi-gate micro-electro-mechanical device with built-in transistor

TTO classification

TTO:6.0846

EPFL units
NANOLAB  
AVP-R-TTO  
DOICountry codeKind codeDate issued

US8872240

US

B2

2014-10-28

US2011298553

US

A1

2011-12-08

TW201110545

TW

A

2011-03-16

US2010171569

US

A1

2010-07-08

WO2010058351

WO

A1

2010-05-27

Available on Infoscience
September 22, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/118416
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés