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patent

Sic high temperature pressure transducer

Akiyama, Terunobu  
2014

The invention concerns a pressure transducer comprising a deflecting membrane, said membrane comprising two piezoresistors (10, 11) of different types, said piezoresistors being arranged such that a same stress or a same strain is applied on said piezoresistors and said piezoresistors (10, 11) yield changes in resistance, wherein a piezoresistor of a first type (10) is positioned such that its current direction is perpendicular to the stress direction (trans verse) and a piezoresistor of a second type is parallel to the stress direction (longitudinal), allowing, when a tensile stress is applied to the transducer, said piezoresistor of the first type to increase its resistance and said piezoresistor of the second type to decrease the resistance; or when a compressive stress is applied to the transducer, said piezoresistor of the first type to decrease its resistance and said piezoresistor of the second type to increase the resistance; wherein said piezoresistor of the first type (10) has a specific width and a length as short as possible and said piezoresistor (11) of the second type has a width as short as possible and a length as long as possible.

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Type
patent
EPO Family ID

47297334

Author(s)
Akiyama, Terunobu  
Note

Alternative title(s) : (de) Sic-hochtemperatur-druckwandler (fr) Transducteur de pression haute température sic

TTO classification

TTO:6.1052

EPFL units
SAMLAB  
AVP-R-TTO  
IdentifierCountry codeKind codeDate issued

EP2769191

EP

B1

2020-03-04

US9557230

US

B2

2017-01-31

US2014238144

US

A1

2014-08-28

EP2769191

EP

A1

2014-08-27

WO2013057689

WO

A1

2013-04-25

Available on Infoscience
May 24, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/137600
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