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patent
High-resolution microscopy and photolithography devices using focusing micromirrors
2010
The invention relates to large-field high-resolution microscopy and photolithography setups operating with polychromatic light. It includes the use of a plurality of focusing micromirrors.
Type
patent
EPO Family ID
42145093
Inventors
Note
Alternative title(s) : (de) Hochauflösende mikroskopie- und photolithographievorrichtungen mit fokussierenden mikrospiegeln (fr) Microscopie haute résolution et dispositifs de photolithographie utilisant des miroirs microscopiques de focalisation
TTO classification
TTO:6.0877
| Patent number | Country code | Kind code | Date issued |
EP2389606 | EP | B1 | 2019-08-28 |
US2016091799 | US | A1 | 2016-03-31 |
US9075227 | US | B2 | 2015-07-07 |
US2011300490 | US | A1 | 2011-12-08 |
EP2389606 | EP | A2 | 2011-11-30 |
WO2010084478 | WO | A3 | 2010-10-28 |
WO2010084478 | WO | A2 | 2010-07-29 |
Available on Infoscience
September 22, 2015
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