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patent

Method and device for determining plasma characteristics

Furno, Ivo  
•
Howling, Alan  
•
Guittienne, Philippe
2016

The invention relates to a method and a device for determining plasma characteristics, the method comprising the steps of: - arranging a measurement probe (2) having a self-inductance in proximity to a plasma (3) to establish inductive coupling between the plasma (3) and the measurement probe (2); - determining a mutual inductance (Mprobe/plasma) between the measurement probe (2) and the plasma (3); - depending on the mutual inductance (Mprobe/plasma), estimating a quantity representing the plasma complex conductivity (σ); and - deriving at least one plasma parameter from the plasma complex conductivity (σ).

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Type
patent
EPO Family ID

53180537

Author(s)
Furno, Ivo  
Howling, Alan  
Guittienne, Philippe
Note

Priority number(s): EP20150166251 20150504

Alternative title(s) : (de) Verfahren, messonde und mesvorrichtung zur bestimmung von plasmaeigenschaften (fr) Méthode, sonde de mesure et appareil de mesure pour déterminer des charactéristiques plasma (en) Method, measurement probe and measurement system for determining plasma characteristics

TTO classification

TTO:6.1324

EPFL units
AVP-R-TTO  
SPC  
IdentifierCountry codeKind codeDate issued

EP3292559

EP

B1

2019-08-07

EP3292559

EP

A1

2018-03-14

WO2016177740

WO

A1

2016-11-10

Available on Infoscience
May 11, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/137225
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