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Verfahren zur Erzeugung von Strukturen im Nanometerbereich
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patent
Verfahren zur Erzeugung von Strukturen im Nanometerbereich
Hoffmann, P.
1999
Details
Metrics
Type
patent
Inventors
Hoffmann, P.
Subjects
[NRG]
EPFL units
LOA
Available on Infoscience
July 20, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/41678