Interferometer coordinate measurement system for use in measurement and machining tools has partially reflecting boundary surfaces within its measurement head with a separation shorter than the coherence length
The invention relates to an interferometer system (41), especially for use in a co-ordinate measuring system. Said interferometer system comprises, disposed in an illumination beam path, a pair of spaced-apart boundary surfaces (52, 53). A boundary surface (53) facing an object (9) is arranged in a detection beam path, a detector (61) being additionally disposed in said detection beam path. The invention also relates to an interferometer system, especially one of the above-described type, which is provided with a speed indicating system for detecting a relative speed between the test head and the object. A frequency filter of the interferometer system is adjusted depending on the relative speed.
32519247
Alternative title(s) : (de) Interferometersystem und messvorrichtung (fr) Systeme interferometrique et dispositif de mesure (en) Interferometer system and measuring device
Patent number | Country code | Kind code | Date issued |
DE10392656 | DE | B4 | 2012-06-14 |
DE10260256 | DE | B9 | 2007-03-01 |
DE10392656 | DE | D2 | 2005-12-22 |
DE10260256 | DE | B4 | 2005-02-17 |
WO2004057266 | WO | A8 | 2005-01-20 |
WO2004057266 | WO | A3 | 2004-11-18 |
DE10260256 | DE | A1 | 2004-07-15 |
AU2003290103 | AU | A1 | 2004-07-14 |
WO2004057266 | WO | A2 | 2004-07-08 |