Electrically tunable optical resonator on a chip for fast tunable integrated lasers
The present invention relates to an electrically tunable photonic resonator device for a component having a fast and flat actuation response, comprising: - At least one optical waveguide with an optical interface for coupling in laser light, - At least one optical resonator including a waveguide being made of an optical resonator material, particularly Si3N4, wherein laser light coupled via the at least one optical waveguide is coupled into the at least one optical resonator, - At least one piezo actuator to apply mechanical stress at least partially onto the at least one optical resonator; wherein the at least one optical resonator, the at least one piezo actuator and the at least one optical waveguide are monolithically integrated on a common substrate of the photonic resonator device; - a mechanical mode suppression means configured to attenuate one or more mechanical modes of oscillation caused by an AC operation of the at least one piezo actuator.
74947363
Alternative title(s) : (fr) Résonateur optique accordable électriquement sur une puce pour lasers intégrés accordables rapidement
TTO:6.2132
Patent number | Country code | Kind code | Date issued |
JP2024510991 | JP | A | 2024-03-12 |
EP4305717 | EP | A1 | 2024-01-17 |
WO2022188990 | WO | A1 | 2022-09-15 |