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patent

Multilayer mems cantilevers

Fantner, Georg  
•
Adams, Jonathan David
•
Hosseini, Nahid
2016

The present invention relates to a cantilever or membrane comprising a body and an elongated beam attached to the body. The elongated beam includes a first layer comprising a first material, a second layer comprising a second material having an elastic modulus different to that of the first material, a third layer comprising a third material having an elastic modulus different to that of the first material, where the first layer is sandwiched between the second layer and the third layer.

  • Details
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Type
patent
EPO Family ID

56263998

Author(s)
Fantner, Georg  

EPFL

Adams, Jonathan David
Hosseini, Nahid
Note

Alternative title(s) : (de) Mehrschichtige mems-träger (fr) Micropoutres de mems multicouche

TTO classification

TTO:6.1363

EPFL units
AVP-R-TTO  
LBNI  
DOICountry codeKind codeDate issued

US10308500

US

B2

2019-06-04

US2018141801

US

A1

2018-05-24

EP3298416

EP

A1

2018-03-28

WO2016189451

WO

A1

2016-12-01

Available on Infoscience
May 11, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/137264
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