Cite this item

Muralt, P., Ledermann, N., Baborowski, J., Barzegar, A., Gentil, S., Belgacem, B., Petitgrand, S., Bosseboeuf, A., & Setter, N. (2005). Piezoelectric micromachined ultrasonic transducers based on PZT thin films. IIEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 52(12), 2276–2288. https://doi.org/10.1109/TUFFC.2005.1563270

Click Copy to copy the citation, or select the text manually.