High Quality Factor Copper Inductors Integrated in Deep Dry Etched Quartz Substrates
2006
Details
Title
High Quality Factor Copper Inductors Integrated in Deep Dry Etched Quartz Substrates
Author(s)
Leroy, Christine ; Pisani, Marcelo B. ; Hibert, Cyrille ; Bouvet, Didier ; Puech, M. ; Ionescu, Adrian M.
Published in
Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006
Conference
DTIP 2006, Stresa, Italy, April 2006
Date
2006
Other identifier(s)
DAR: 11993
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Scientific production and competences > STI - School of Engineering > CMI - Center of MicroNanoTechnology
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Scientific production and competences > STI - School of Engineering > CMI - Center of MicroNanoTechnology
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2006-05-10