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  4. Composite photopolymer microstructures: From planar to 3D devices
 
conference paper

Composite photopolymer microstructures: From planar to 3D devices

Renaud, Philippe  
•
Metz, Stefan  
•
Jiguet, Sébastien  
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2003
BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS
12th International Conference on Solid-State Sensors, Actuators and Microsystems
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Type
conference paper
DOI
10.1109/SENSOR.2003.1216934
Web of Science ID

WOS:000184567300249

Author(s)
Renaud, Philippe  
Metz, Stefan  
Jiguet, Sébastien  
Bertsch, Arnaud  
Date Issued

2003

Published in
BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS
Volume

2

Start page

991

End page

994

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS4  
Event nameEvent placeEvent date
12th International Conference on Solid-State Sensors, Actuators and Microsystems

BOSTON, MASSACHUSETTS

JUN 09-12, 2003

Available on Infoscience
September 13, 2005
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/216195
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