conference paper
Advanced Sensor Systems by Low-Temperature Heterogeneous 3D Integration Processes
January 1, 2018
2018 Symposium On Design, Test, Integration & Packaging Of Mems And Moems (Dtip)
A few application demonstrators of heterogeneous 3D integrated systems including innovative nanosensors for gas detection and biofludic applications have been successfully implemented showing efficient low-temperature heterogeneous integration processes, miniaturization, low power consumption, extremely low detection limits (5 ppm) and novel functionalities very interesting for smart sensors in automotive and healthcare applications.
Type
conference paper
Web of Science ID
WOS:000468341300023
Author(s)
Date Issued
2018-01-01
Publisher
Publisher place
New York
Published in
2018 Symposium On Design, Test, Integration & Packaging Of Mems And Moems (Dtip)
ISBN of the book
978-1-5386-6199-4
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Roma, ITALY | May 22-25, 2018 | |
Available on Infoscience
June 18, 2019
Use this identifier to reference this record