Loading...
conference paper
Self-aligned VCSEL-microlens scanner with large scan range
2012
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
This paper reports on the design, fabrication and optical characterization of a self-aligned microlaser scanning system consisting of a vertical cavity surface emitting laser (VCSEL) source and a MEMS-actuated microlens scanner. The alignment and the spacing between the VCSEL and the MEMS scanner are achieved through lithographically patterned alignment grooves and precision micro-beads. Horizontal displacements of ±70 μm, corresponding to scanning angles of ±7°, have been demonstrated.
Type
conference paper
Authors
Publication date
2012
Publisher
Published in
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
Start page
656
End page
659
Peer reviewed
REVIEWED
EPFL units
| Event name | Event place | Event date |
Paris, France | January 29 - February 2, 2012 | |
Available on Infoscience
July 9, 2015
Use this identifier to reference this record