Characterisation and modelling of nitrogen plasmas for the deposition of nanostructured GaN using different plasma sources
2014
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Details
Title
Characterisation and modelling of nitrogen plasmas for the deposition of nanostructured GaN using different plasma sources
Author(s)
Martinet, David
Advisor(s)
Date
2014
Publisher
Lausanne, EPFL
Keywords
Language
English
Other identifier(s)
urn: urn:nbn:ch:bel-epfl-thesis6202-1
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Scientific production and competences > EPFL Theses
Work produced at EPFL
Published
Theses
Scientific production and competences > EPFL Theses
Work produced at EPFL
Published
Theses
Record creation date
2014-07-09